Precision Mechanical Engineering group developed
many kinds of optical components and monitors to be used in ultra-high vacuum
environment: KB (Kirkpatrick-Baez Mirror), using the Piezo to change the focal
length of the bendable mirror; used in the inelastic experiment of the
ultra-high resolution analyzer; with the YAG material and actuator to detect
the electron beam position of the screen monitor; the OTR Monitor by using the
OTR principle; Photon Beam Position Monitor; SR interferometer to measure the
beam size (BSM Monitor),etc. The Inspection equipment that was used is CMM,
ZYGO-GPI XP4 interferometer, WYKO TOPO-2D and LTP (Long Trace Profiler).