LIGA is a micromachining technique including lithography, electroforming and
micro molding. High intensity and highly collimated SR X-rays is used to
provide high resolution and high aspect ratio lithographic capability. LIGA
technique has been widely used in micro optic, micro mechanic and microwave
applications. At NSRRC, all the LIGA processes, including x-ray mask
fabrication, can be done in the micromachining station.
Facility and equipment
Micromachining techniques
- LIGA process
- Deep X-ray lithography
- Laser direct-writing
- Micro electroforming
- Micro hot embossing
Micromachining capabilities
- Resolution: one micron
- Aspect ratio: ~ 50
- Material: polymer, nickel, nickel alloy, gold
(exact specifications depend on geometry and material of the microstructure)
Useful information