0428同步年報-2021-全

Facility Status 107 (b) Spot size on sample Flux @ 10 keV Energy resolution Energy range Resolution TXM Mode ~30 μm 2 × 10 11 p/s 1.4 × 10 -4 5−12 keV 30 nm (a) Spot size on sample Flux @ 30 keV Energy resolution Energy range Resolution White beam 20 mm × 17 mm 2.1 × 10 18 p/s Non 5−inf 0.5 μm Mono beam/ Multi-layer 20 mm × 17 mm 2.1 × 10 13 p/s 1%–2% 5−50 keV 0.5 μm Mono beam/ DCM Si (111) 20 mm × 2.5 mm 2 x 10 12 p/s 1.4 × 10 -4 5−40 keV 0.5 μm Table 1 : (a) Beam parameters on the sample position for each mode for PXM. (b) Beam parameters on the sample position for TXM. × 10 17 −5.8 × 10 16 photons s -1 mrad -2 mm -2 0.1%BW -1 0.5A -1 and 2.6 × 10 14 −8.9 × 10 12 photons s -1 , respectively in the energy range from 5−50 keV. TPS 31A beamline is shown in Figs. 1(a)−1(d) . Its horizontal divergence is further confined to 0.5 mrad by a water-cooled pinhole due to a limitation of a diamond window. The diamond windows, located in the optical hutch, have thickness 100 μm and 200 μm respectively, thereby removing low-energy photons and decreasing the radiation power. There is a beryllium window of thickness 250 μm between the diamond window and the double multilayer monochromator/double crystal monochromator (DMM/DCM) chamber to protect the ultra-high vacuum environment upstream of the monochromator. Another beryllium window of thickness 250 μm is located at the end of the beamline, separating the ultrahigh-vacuum section from the experimental station at atmospheric pressure. The beamline is designed with the following four working modes: (a) PXM with white beam mode: its layout is shown in Fig. 1(a) . In addition to the above optical components in the figure, we added two slit systems to define the beam size and to monitor the beam position. (b) PXM with DMM mode. Its layout is shown in Fig. 2(b) . The DMM is located 31.5 m from the source and uses a top-side water-cooled dual [W/Si] 100 multilayers. The DMM has an energy resolution 2%−6% in energy range 5−50 keV. (c) PXM with DCM mode: Its layout is shown in Fig. 1(c) . The vertical collimator mirror (VCM), positioned 28 m from the source to form a parallel beam for the DCM, is cooled with water on its top side. The DCM is located at distance 32.5 m from the source, with liquid-nitrogen-cooled dual Si(111) crystals; the energy resolution (Δ E / E ) of the dual crystals is 1.34 × 10 -4 to 1.67 × 10 -4 in energy range 5−30 keV. (d) TXM with DCM mode: Its layout is shown in Fig. 1(d) . In addition to the VCM and DCM mentioned in the PXM with DCM mode, a horizontal focusing mirror (HFM) and a vertical focusing mirror at 37 m and 44.5 m were added, all focused at 48.1 m as the secondary source of the capillary condenser. The spot size on a sample, flux, energy resolution and energy range are listed in Table 1(a) PXM and Table 1(b) TXM mode. The 3D drawing of endstation and beamline is shown as Fig. 2 . The Endstation PXM and TXM are designed to capture quickly and accurately 2D X-ray images and 3D X-ray tomographies. Users are able to obtain valuable data with their sample of varied size, material and experimental conditions. For the PXM endstation, with sub-micrometer resolution, the sample is expected for a large size, with rapid imaging and capabilities in situ . The sample stage is thus designed for heavy duty, along with a large travel range of the sample stage. The maximum load of the sample stage can be up to 50 kg, which allows a maximum travel range up to 300 mm × 70 mm, which allows a large sample to be stitched. The PXM is also aimed for ultra-high-speed imaging capabilities; a high-speed image camera system is installed with up to 60,000 frames per second. For large quantities of a sample, an automatic sample exchange system is installed. 5 This system is able to change the sample in 30 seconds. With the development of On-The-Fly tomography, one sample with one tomography can be finished in 1 minute. A hybrid-type detector for the diffraction contrast tomography is also equipped. A 3D drawing of the PXM endstation and sample exchange system is shown in Fig. 3 . To store a huge data set from the PXM endstation, a hybrid type (combining the Fig. 2 : 3D drawing of endstation and beamline of TPS 31A .

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