0428同步年報-2021-全

106 ACTIVITY REPORT 2021 Micro-Tomography and Transmission X-ray Microscopy at Taiwan Photon Source P rojection X-ray Microscope (PXM) beamline TPS 31A1 will be opened to users in the second half of 2022, with the resolution of sub-micrometer tomography and as large as 300 mm x 70 mm for two-dimensional images. The transmission X-ray microscope (TXM) ( TPS 31A2 ) branch, the high resolution X-ray image of 30 nm, will be shortly assembled and tested in early 2023. Since 2004, the TXM was installed at TLS 01B , 1−3 at which the highest 2D-resolution is better than 60 nm with Zernike phase contrast. This was the first TXM that utilized a capillary as the condenser which greatly increases the flux and also the spatial resolution indirectly. Using this scheme, in subsequent research, the resolution of TXM is better than 30 nm, 4 which is limited mainly by the zone-plate fabrication. In phase II of the Taiwan Photon Source (TPS) beamline, the TPS 31A beamline was hence planned to accommodate PXM and TXM in the same beamline. The primary factor of the X-ray imaging is the photo flux. In this case, the W100 wiggler was chosen as the source of TPS 31A , which gives two orders of magnitude greater flux than the conventional bending magnets in the TPS at 50 keV. The brightness and flux of this wiggler source are 4.9 Fig. 1 : (a) PXM with white beam mode; the beam from the source impacts the sample without striking any optics. (b) PXM with DMM mode: The beam from the source impacts the DMM then strikes the sample. (c) PXM with DCM mode: The beam from the source impacts the VCM, DCM and PM then strikes the sample. (d) TXM with DCM mode: The beam from source impacts the VCM, DCM, and is refocused by HFM and VFM then strikes the sample. There are filters and attenuators in the beam path in all modes (not shown in this figure). (a) (b) (c) (d)