2020同步年報

098 ACTIVITY REPORT 2020 Fig. 4 : Relative sensitivity factor f of an extractor ionization gauge for N 2 (f = 1.00), H 2 ( f = 0.45), CH 4 ( f = 1.37), CO 2 ( f = 1.38) and He ( f = 0.18). [Reproduced from Ref. 2] As mentioned above, the standard leak element can be used to calibrate in situ an ionization gauge; Fig. 4 shows the relative sensitivity fac- tors of an extractor gauge measured with the conductance modulation method. 1 The relative sensitivity factors for N 2 , H 2 , CH 4 , CO 2 and He are 1.00, 0.45, 0.37, 1.38 and 0.18 respectively; these measured values coincide closely with the data of previous studies. In summary, we demonstrated the feasibility of using femtosecond laser micromachining to create a novel standard leak element, of which the molecular flow conductance for nitrogen can be achieved as small as 2 × 10 -9 L s -1 . (Reported by Che-Kai Chan) References 1. C.-K. Chan, C.-Y. Tu, S.-D. Yeh, C.-C. Chang, T.-C. Lin, C.-W. Luo, C.-S. Hwang, Vacuum 180 , 109650 (2020). 2. C.-K. Chan, S.-D. Yeh, C.-C. Chang, C.-Y. Tu, I.-C. Yang, K.-L. Chang, C.-W. Luo, C.-S. Hwang, Vacuum 184 , 109945 (2021). Conceptual Design of TPS Phase-III Beamlines T he third phase of the Taiwan Photon Source (TPS) beamline project is officially launched in 2021. This third phase of the beamline construction project includes five insertion devices and four bending magnets, for nine beamlines in total. Of these nine beamlines, three are soft X-ray beamlines, one is a tender beamline and the other five are hard X-ray beamlines. The primary object of the third-phase beamline is to move the beamline of the cur- rent Taiwan Light Source (TLS) to TPS, and also serve users and provide the most updated technology. The third beam- line project includes the following beamlines: 1. TPS 11A In-situ Serial Protein Crystallography Beamline 2. TPS 14A Small-angle X-ray Scattering Beamline 3. TPS 20A Two Dimensional X-ray Diffraction Beamline 4. TPS 32A Tender X-ray Absorption Spectroscopy Beamline 5. TPS 33A Dragon Beamline 6. TPS 35A Soft X-ray Absorption Spectroscopy Beamline 7. TPS 38A X-ray Absorption Spectroscopy Beamline 8. TPS 43A Ambient Pressure X-ray Photoelectron Spectroscopy Beamline 9. TPS 47A High-resolution X-ray Absorption Spectroscopy Beamline The current construction schedule of the third phase of the TPS beamlines is shown in Fig. 1 . The planned schedule is from 2021 to 2026; the construction of these nine beam- lines is estimated to take six years. The floor map of the TPS beamline is presented in Fig. 2 . The main purpose of the third phase of the beamlines is to relocate the beamlines of the current TLS and to continue to develop and to achieve the most important scientific topics. It contains more challenging protein crystallogra- phy (PX) on site, mainly for proteins that cannot be suc- cessfully resolved at present. The other eight beamlines include small-angle scattering, powder diffraction, dragon beamline, X-ray absorption spectrum, soft X-ray absorption spectrum, chamber pressure/vacuum photoelectron spec- troscopy, soft X-ray absorption spectrum, etc .; all are trans- ferred from the current TLS. The functions of these eight beamlines in operation is expected to replace the scientific research and development capabilities of TLS in the short- est time. At the time of writing, a report of most conceptual design of these beamlines is finished, as introduced in the following paragraphs.