Imaging Extreme Ultraviolet Radiation Using Nanodiamonds with Nitrogen-vacancy Centers
Teng-I Yang, Yuen Yung Hui, Jen-Iu Lo, Yu-Wen Huang, Yin-Yu Lee, Bing-Ming Cheng*, and Huan-Cheng Chang*
2024/02/20
Extreme ultraviolet (EUV) radiation with wavelengths of 10–121 nm has drawn considerable attention recently for its use in photolithography to fabricate nanoelectronic chips. This study demonstrates, for the first time, fluorescent nanodiamonds (FNDs) with nitrogen-vacancy (NV) centers as scintillators to image and characterize EUV radiations. The FNDs employed are ∼100 nm in size; they form a uniform and stable thin film on an indium–tin–oxide-coated slide by electrospray deposition. The film is nonhygroscopic and photostable and can emit bright red fluorescence from NV0 centers when excited by EUV light. An FND-based imaging device has been developed and applied for beam diagnostics of 50 nm and 13.5 nm synchrotron radiations, achieving a spatial resolution of 30 μm using a film of ∼1 μm thickness. The noise equivalent power density is 29 μW/(cm2 Hz1/2) for the 13.5 nm radiation. The method is generally applicable to imaging EUV radiation from different sources.
Research Highlights
