Beamline Name
|
NSRRC_BL19A1 |
| Beamline Website |
http://140.110.203.42/bldoc/19ALitho.htm |
| Owner/Operator |
NSRRC/NSRRC-Device Tech. Group |
| Operational (general use) |
Yes |
| %Time available (general use) |
75% |
| Beamtime Schedule |
http://portal.nsrrc.org.tw/schedule/lsch.php |
| Experiments |
X-ray Lithography, Nano-fabrication |
| Source |
Bending Magnet |
| Ring Current(mA) |
300 mA |
| Average Beam Lifetime |
Infinite Under NSRRC Top Up Conditions |
| Energy Range |
0.8 ~ 2 keV (15.4 Å ~ 6.1 Å) |
| Spot Size |
5 mm (H) x 20 mm (V) |
| Optics |
Toroidal Focusing Mirror |
| Flux |
4 x 10E(10) |
| Mirrors |
Pt Coated |
| Other Instrumentation |
Clean Room |
| Exposure Station |
With 4" Mask Holder |
