Beamline Name
|
NSRRC_BL18B1 |
| Beamline Website |
http://140.110.203.42/bldoc/18BLIGA.htm |
| Owner/Operator |
NSRRC/NSRRC-Device Tech. Group |
| Operational (general use) |
Yes |
| %Time available (general use) |
75% |
| Beamtime Schedule |
http://portal.nsrrc.org.tw/schedule/lsch.php |
| Experiments |
X-ray Micromachining, LIGA |
| Source |
Bending Magnet |
| Ring Current(mA) |
300 mA |
| Average Beam Lifetime |
Infinite Under NSRRC Top Up Conditions |
| Energy Range |
0.5 ~ 3 keV (24.7 Å ~4.1 Å) |
| Spot Size |
150 mm (H) x 10 mm (V) |
| Optics |
None |
| Flux |
3 x 10E(11) |
| Other Instrumentation |
Clean Room |
| X-ray Scanner |
Jenoptik DEX01 (4" substrate) |
