LIGA is a nano/micro fabrication technology including lithography, electroforming and micro molding. High intensity and highly collimated SR X-rays is used to provide high resolution and high aspect ratio lithographic capability. LIGA technique has been widely used fabricating micro optic, micro mechanic and microwave applications. At NSRRC, all the LIGA processes, including x-ray mask fabrication, can be done in the micromachining station. Our research interests are developing LIGA-based micro/nano devices for scientific researches and industrial applications. Some general information are listed here, and for more detailed information please visit the website of the Micromachining Station.

Liga Website: http://www.nsrrc.org.tw/english/research8_1_Micromachining_Station.aspx